3

Integrated SPM probes with NEMS technology

Year:
2007
Language:
english
File:
PDF, 747 KB
english, 2007
4

Simulation and optimization on the squeeze-film damping of a novel high-g accelerometer

Year:
2006
Language:
english
File:
PDF, 259 KB
english, 2006
9

Micro cantilever probe array integrated with Piezoresistive sensor

Year:
2004
Language:
english
File:
PDF, 264 KB
english, 2004